Epitaxial Growth of Silicon on Poly-Crystalline Si Seed layer at Low Temperature by Using Hot Wire Chemical Vapor Deposition

Dr. Hameed NaseemMANAL ABDULLAH ABDULAZIZ ALDAWSARI2022-06-012022-06-0127219https://drepo.sdl.edu.sa/handle/20.500.14154/57400Epitaxial Growth of Silicon on Poly-Crystalline Si Seed layer at Low Temperature by Using Hot Wire Chemical Vapor DepositionThesis